№

Name

Quantity

1.

Magnetron source with the power unit.
Size of a target, mm
Power unit
- category current, move, A

4 pcs

Ø143х8 мм

4

2.

Ionic source

- working zone, mm

- category current, A

- working tension, V

1

Ø56

0.7

3000

3.

Industrial equipment

1 package

4.

Forvacuum WU232 unit

1

5.

High-vacuum otkachny the module on the basis of the cryogenic pump of Du 250

1

6.

Lock vacuum VAT DN 250

1

7.

Heaters intra chamber steering with the temperature of substrate with opportunity up to 200 ˚ Page.

1

8.

Vacuum sensors:

-         PFEIFFER  IKR 251

-         PFEIFFER  PKR 251

-         PFEIFFER  TPR 280

1

1

2

9.

System pneumatic on the basis of elements SMC

1

10.

System hydraulic on the basis of elements SMC

1

11.

System automatic supply of technological gases with possibility of work at the same time with 4 gases

1

12.

Control system on the basis of the industrial controler of the German corporation WAGO Kontakttehnik GmbH.

Touch control panel (Touch screen interface)

Steering manual and automatic.

Remote access

Full automation of process of drawing coverings.

Full automation of process of drawing coverings.